000 00274nam a2200121Ia 4500
008 161008s9999 xx 000 0 und d
100 _aJHAJHRIA T
245 _aELECTRONICS MATERIALS AND PROCESSES
250 _a1ST
260 _bVAYU
_c2011
300 _a5.88
942 _cBK
999 _c43365
_d43365