000
00272nam a2200109Ia 4500
008
161008s9999 xx 000 0 und d
100
_a
CUI ZHENG
245
_a
NANOFABRICATION PRINCIPLES, CAPABILITIES AND LIMITS
260
_b
SPRINGER
_c
2012
300
_a
343
942
_c
BK
999
_c
42346
_d
42346