000 00354nam a2200121Ia 4500
008 241230s9999||||xx |||||||||||||| ||und||
020 _a1558990046
100 _aGross, Mihal E.
_9101042
245 0 _aChemical Perspectives of Microelectronic Materials, Vol-131
260 _bMaterial Research Society
_aPittsburgh
_c1989
300 _a642p.
942 _cBK
999 _c263389
_d263389