000 | 00354nam a2200121Ia 4500 | ||
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008 | 241230s9999||||xx |||||||||||||| ||und|| | ||
020 | _a1558990046 | ||
100 |
_aGross, Mihal E. _9101042 |
||
245 | 0 | _aChemical Perspectives of Microelectronic Materials, Vol-131 | |
260 |
_bMaterial Research Society _aPittsburgh _c1989 |
||
300 | _a642p. | ||
942 | _cBK | ||
999 |
_c263389 _d263389 |