000 00264nam a2200109Ia 4500
008 230515s9999||||xx |||||||||||||| ||und||
100 _aYanda Richard F.
_961075
245 0 _aDemystifying Chipmaking
260 _bElsevier
_c2005
300 _a256
942 _cBK
_pCL
999 _c195400
_d195400