000 00305nam a2200121Ia 4500
008 160921s9999 xx 000 0 und d
100 _aCAMPBELL STEPHEN
245 _aSCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION
250 _a2nd
260 _bOXFORD DELHI
_c2012
300 _a603
942 _cBK
999 _c1732
_d1732